6/3/2010	10:07:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2010	10:07:56 AM	Recipe started at 10:07 AM
6/3/2010	10:07:56 AM	H2 valve closed
6/3/2010	10:07:56 AM	BCl3 valve closed
6/3/2010	10:07:56 AM	PH3 valve closed
6/3/2010	10:07:56 AM	SiCl4 pre valve closed
6/3/2010	10:07:56 AM	SiCl4 post valve closed
6/3/2010	10:07:56 AM	Main Vac valve closed
6/3/2010	10:07:56 AM	Bypass valve closed
6/3/2010	10:07:56 AM	Bubbler valve closed
6/3/2010	10:07:56 AM	Helium valve opened
6/3/2010	10:07:56 AM	Helium MFC set to  500.000000
6/3/2010	10:07:56 AM	H2 MFC set to  0.000000
6/3/2010	10:07:56 AM	BCl3 MFC set to  0.000000
6/3/2010	10:07:56 AM	PHl3 MFC set to  0.000000
6/3/2010	10:07:56 AM	SiCl4 MFC set to  0.000000
6/3/2010	10:07:56 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	10:07:56 AM	Tube furnace set to 0
6/3/2010	10:09:16 AM	Helium valve closed
6/3/2010	10:09:16 AM	H2 valve closed
6/3/2010	10:09:16 AM	BCl3 valve closed
6/3/2010	10:09:16 AM	PH3 valve closed
6/3/2010	10:09:16 AM	SiCl4 pre valve closed
6/3/2010	10:09:16 AM	SiCl4 post valve closed
6/3/2010	10:09:16 AM	Main Vac valve closed
6/3/2010	10:09:16 AM	Bypass valve closed
6/3/2010	10:09:16 AM	Bubbler valve closed
6/3/2010	10:09:16 AM	Helium MFC set to  0.000000
6/3/2010	10:09:16 AM	H2 MFC set to  0.000000
6/3/2010	10:09:16 AM	BCl3 MFC set to  0.000000
6/3/2010	10:09:16 AM	PHl3 MFC set to  0.000000
6/3/2010	10:09:16 AM	SiCl4 MFC set to  0.000000
6/3/2010	10:09:16 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	10:09:16 AM	Tube furnace set to 0
6/3/2010	10:09:16 AM	Run finished at 10:09 AM
6/3/2010	10:09:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2010	10:17:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	10:17:06 AM	Recipe started at 10:17 AM
6/3/2010	10:17:06 AM	Helium valve closed
6/3/2010	10:17:06 AM	H2 valve closed
6/3/2010	10:17:06 AM	BCl3 valve closed
6/3/2010	10:17:06 AM	PH3 valve closed
6/3/2010	10:17:06 AM	SiCl4 pre valve closed
6/3/2010	10:17:06 AM	SiCl4 post valve closed
6/3/2010	10:17:06 AM	Main Vac valve closed
6/3/2010	10:17:06 AM	Bubbler valve closed
6/3/2010	10:17:06 AM	Bypass valve opened
6/3/2010	10:17:06 AM	Helium MFC set to  0.000000
6/3/2010	10:17:06 AM	H2 MFC set to  0.000000
6/3/2010	10:17:06 AM	BCl3 MFC set to  0.000000
6/3/2010	10:17:06 AM	PHl3 MFC set to  0.000000
6/3/2010	10:17:06 AM	SiCl4 MFC set to  0.000000
6/3/2010	10:17:06 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	10:17:06 AM	Tube furnace set to 0
6/3/2010	10:17:53 AM	Helium valve closed
6/3/2010	10:17:53 AM	H2 valve closed
6/3/2010	10:17:53 AM	BCl3 valve closed
6/3/2010	10:17:53 AM	PH3 valve closed
6/3/2010	10:17:53 AM	SiCl4 pre valve closed
6/3/2010	10:17:53 AM	SiCl4 post valve closed
6/3/2010	10:17:53 AM	Bubbler valve closed
6/3/2010	10:17:53 AM	Main Vac valve opened
6/3/2010	10:17:53 AM	Bypass valve opened
6/3/2010	10:17:53 AM	Helium MFC set to  0.000000
6/3/2010	10:17:53 AM	H2 MFC set to  0.000000
6/3/2010	10:17:53 AM	BCl3 MFC set to  0.000000
6/3/2010	10:17:53 AM	PHl3 MFC set to  0.000000
6/3/2010	10:17:53 AM	SiCl4 MFC set to  0.000000
6/3/2010	10:17:53 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	10:17:53 AM	Tube furnace set to 0
6/3/2010	10:17:54 AM	Run finished at 10:17 AM
6/3/2010	10:17:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	10:28:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2010	10:28:38 AM	Recipe started at 10:28 AM
6/3/2010	10:28:38 AM	H2 valve closed
6/3/2010	10:28:38 AM	BCl3 valve closed
6/3/2010	10:28:38 AM	PH3 valve closed
6/3/2010	10:28:38 AM	SiCl4 pre valve closed
6/3/2010	10:28:38 AM	SiCl4 post valve closed
6/3/2010	10:28:38 AM	Main Vac valve closed
6/3/2010	10:28:38 AM	Bypass valve closed
6/3/2010	10:28:38 AM	Bubbler valve closed
6/3/2010	10:28:38 AM	Helium valve opened
6/3/2010	10:28:38 AM	Helium MFC set to  500.000000
6/3/2010	10:28:38 AM	H2 MFC set to  0.000000
6/3/2010	10:28:38 AM	BCl3 MFC set to  0.000000
6/3/2010	10:28:38 AM	PHl3 MFC set to  0.000000
6/3/2010	10:28:38 AM	SiCl4 MFC set to  0.000000
6/3/2010	10:28:38 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	10:28:38 AM	Tube furnace set to 0
6/3/2010	10:29:59 AM	Helium valve closed
6/3/2010	10:29:59 AM	H2 valve closed
6/3/2010	10:29:59 AM	BCl3 valve closed
6/3/2010	10:29:59 AM	PH3 valve closed
6/3/2010	10:29:59 AM	SiCl4 pre valve closed
6/3/2010	10:29:59 AM	SiCl4 post valve closed
6/3/2010	10:29:59 AM	Main Vac valve closed
6/3/2010	10:29:59 AM	Bypass valve closed
6/3/2010	10:29:59 AM	Bubbler valve closed
6/3/2010	10:29:59 AM	Helium MFC set to  0.000000
6/3/2010	10:29:59 AM	H2 MFC set to  0.000000
6/3/2010	10:29:59 AM	BCl3 MFC set to  0.000000
6/3/2010	10:29:59 AM	PHl3 MFC set to  0.000000
6/3/2010	10:29:59 AM	SiCl4 MFC set to  0.000000
6/3/2010	10:29:59 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	10:29:59 AM	Tube furnace set to 0
6/3/2010	10:29:59 AM	Run finished at 10:29 AM
6/3/2010	10:29:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2010	10:33:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	10:33:20 AM	Recipe started at 10:33 AM
6/3/2010	10:33:20 AM	Helium valve closed
6/3/2010	10:33:20 AM	H2 valve closed
6/3/2010	10:33:20 AM	BCl3 valve closed
6/3/2010	10:33:20 AM	PH3 valve closed
6/3/2010	10:33:20 AM	SiCl4 pre valve closed
6/3/2010	10:33:20 AM	SiCl4 post valve closed
6/3/2010	10:33:20 AM	Main Vac valve closed
6/3/2010	10:33:20 AM	Bubbler valve closed
6/3/2010	10:33:20 AM	Bypass valve opened
6/3/2010	10:33:20 AM	Helium MFC set to  0.000000
6/3/2010	10:33:20 AM	H2 MFC set to  0.000000
6/3/2010	10:33:20 AM	BCl3 MFC set to  0.000000
6/3/2010	10:33:20 AM	PHl3 MFC set to  0.000000
6/3/2010	10:33:20 AM	SiCl4 MFC set to  0.000000
6/3/2010	10:33:20 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	10:33:20 AM	Tube furnace set to 0
6/3/2010	10:34:08 AM	Helium valve closed
6/3/2010	10:34:08 AM	H2 valve closed
6/3/2010	10:34:08 AM	BCl3 valve closed
6/3/2010	10:34:08 AM	PH3 valve closed
6/3/2010	10:34:08 AM	SiCl4 pre valve closed
6/3/2010	10:34:08 AM	SiCl4 post valve closed
6/3/2010	10:34:08 AM	Bubbler valve closed
6/3/2010	10:34:08 AM	Main Vac valve opened
6/3/2010	10:34:08 AM	Bypass valve opened
6/3/2010	10:34:08 AM	Helium MFC set to  0.000000
6/3/2010	10:34:08 AM	H2 MFC set to  0.000000
6/3/2010	10:34:08 AM	BCl3 MFC set to  0.000000
6/3/2010	10:34:08 AM	PHl3 MFC set to  0.000000
6/3/2010	10:34:08 AM	SiCl4 MFC set to  0.000000
6/3/2010	10:34:08 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	10:34:08 AM	Tube furnace set to 0
6/3/2010	10:34:08 AM	Run finished at 10:34 AM
6/3/2010	10:34:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	10:34:24 AM	Helium MFC set to  100.000000
6/3/2010	10:34:43 AM	Helium valve opened
6/3/2010	10:34:48 AM	Helium valve closed
6/3/2010	10:34:53 AM	Helium MFC set to  50.000000
6/3/2010	10:34:54 AM	Helium valve opened
6/3/2010	10:43:26 AM	Helium valve closed
6/3/2010	10:47:26 AM	Helium valve opened
6/3/2010	11:01:01 AM	Helium valve closed
6/3/2010	11:02:53 AM	Helium valve opened
6/3/2010	11:08:37 AM	Helium valve closed
6/3/2010	11:10:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/3/2010	11:10:07 AM	Recipe started at 11:10 AM
6/3/2010	11:10:07 AM	Helium valve closed
6/3/2010	11:10:07 AM	H2 valve closed
6/3/2010	11:10:07 AM	BCl3 valve closed
6/3/2010	11:10:07 AM	PH3 valve closed
6/3/2010	11:10:07 AM	SiCl4 pre valve closed
6/3/2010	11:10:07 AM	SiCl4 post valve closed
6/3/2010	11:10:07 AM	Main Vac valve closed
6/3/2010	11:10:07 AM	Bypass valve closed
6/3/2010	11:10:07 AM	Bubbler valve closed
6/3/2010	11:10:07 AM	Helium MFC set to  0.000000
6/3/2010	11:10:07 AM	H2 MFC set to  0.000000
6/3/2010	11:10:07 AM	BCl3 MFC set to  0.000000
6/3/2010	11:10:07 AM	PHl3 MFC set to  0.000000
6/3/2010	11:10:07 AM	SiCl4 MFC set to  0.000000
6/3/2010	11:10:07 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	11:10:07 AM	Tube furnace set to 0
6/3/2010	11:10:08 AM	Run finished at 11:10 AM
6/3/2010	11:10:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/3/2010	11:10:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	11:10:18 AM	Recipe started at 11:10 AM
6/3/2010	11:10:18 AM	Helium valve closed
6/3/2010	11:10:18 AM	H2 valve closed
6/3/2010	11:10:18 AM	BCl3 valve closed
6/3/2010	11:10:18 AM	PH3 valve closed
6/3/2010	11:10:18 AM	SiCl4 pre valve closed
6/3/2010	11:10:18 AM	SiCl4 post valve closed
6/3/2010	11:10:18 AM	Main Vac valve closed
6/3/2010	11:10:18 AM	Bubbler valve closed
6/3/2010	11:10:18 AM	Bypass valve opened
6/3/2010	11:10:18 AM	Helium MFC set to  0.000000
6/3/2010	11:10:18 AM	H2 MFC set to  0.000000
6/3/2010	11:10:18 AM	BCl3 MFC set to  0.000000
6/3/2010	11:10:18 AM	PHl3 MFC set to  0.000000
6/3/2010	11:10:18 AM	SiCl4 MFC set to  0.000000
6/3/2010	11:10:18 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	11:10:19 AM	Tube furnace set to 0
6/3/2010	11:10:19 AM	Helium valve closed
6/3/2010	11:10:19 AM	H2 valve closed
6/3/2010	11:10:19 AM	BCl3 valve closed
6/3/2010	11:10:19 AM	PH3 valve closed
6/3/2010	11:10:19 AM	SiCl4 pre valve closed
6/3/2010	11:10:19 AM	SiCl4 post valve closed
6/3/2010	11:10:19 AM	Bubbler valve closed
6/3/2010	11:10:19 AM	Main Vac valve opened
6/3/2010	11:10:19 AM	Bypass valve opened
6/3/2010	11:10:19 AM	Helium MFC set to  0.000000
6/3/2010	11:10:19 AM	H2 MFC set to  0.000000
6/3/2010	11:10:19 AM	BCl3 MFC set to  0.000000
6/3/2010	11:10:19 AM	PHl3 MFC set to  0.000000
6/3/2010	11:10:19 AM	SiCl4 MFC set to  0.000000
6/3/2010	11:10:19 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	11:10:19 AM	Tube furnace set to 0
6/3/2010	11:10:19 AM	Run finished at 11:10 AM
6/3/2010	11:10:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	11:10:26 AM	Helium MFC set to  100.000000
6/3/2010	11:10:31 AM	Helium valve opened
6/3/2010	11:11:47 AM	Helium valve closed
6/3/2010	11:12:05 AM	Recipe started at 11:12 AM
6/3/2010	11:12:05 AM	Helium valve closed
6/3/2010	11:12:05 AM	BCl3 valve closed
6/3/2010	11:12:05 AM	PH3 valve closed
6/3/2010	11:12:05 AM	SiCl4 pre valve closed
6/3/2010	11:12:05 AM	SiCl4 post valve closed
6/3/2010	11:12:06 AM	Main Vac valve closed
6/3/2010	11:12:06 AM	Bypass valve closed
6/3/2010	11:12:06 AM	Bubbler valve closed
6/3/2010	11:12:06 AM	H2 valve opened
6/3/2010	11:12:06 AM	Helium MFC set to  0.000000
6/3/2010	11:12:06 AM	H2 MFC set to  500.000000
6/3/2010	11:12:06 AM	BCl3 MFC set to  0.000000
6/3/2010	11:12:06 AM	PHl3 MFC set to  0.000000
6/3/2010	11:12:06 AM	SiCl4 MFC set to  0.000000
6/3/2010	11:12:06 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	11:12:06 AM	Tube furnace set to 0
6/3/2010	11:13:30 AM	Helium valve closed
6/3/2010	11:13:30 AM	BCl3 valve closed
6/3/2010	11:13:30 AM	PH3 valve closed
6/3/2010	11:13:30 AM	SiCl4 pre valve closed
6/3/2010	11:13:30 AM	SiCl4 post valve closed
6/3/2010	11:13:30 AM	Main Vac valve closed
6/3/2010	11:13:30 AM	Bypass valve closed
6/3/2010	11:13:30 AM	H2 valve opened
6/3/2010	11:13:30 AM	Bubbler valve opened
6/3/2010	11:13:30 AM	Helium MFC set to  0.000000
6/3/2010	11:13:30 AM	H2 MFC set to  500.000000
6/3/2010	11:13:30 AM	BCl3 MFC set to  0.000000
6/3/2010	11:13:30 AM	PHl3 MFC set to  0.000000
6/3/2010	11:13:30 AM	SiCl4 MFC set to  0.000000
6/3/2010	11:13:30 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	11:13:30 AM	Tube furnace set to 1000
6/3/2010	11:33:30 AM	Helium valve closed
6/3/2010	11:33:30 AM	BCl3 valve closed
6/3/2010	11:33:30 AM	PH3 valve closed
6/3/2010	11:33:30 AM	Main Vac valve closed
6/3/2010	11:33:30 AM	Bypass valve closed
6/3/2010	11:33:30 AM	H2 valve opened
6/3/2010	11:33:30 AM	SiCl4 pre valve opened
6/3/2010	11:33:30 AM	SiCl4 post valve opened
6/3/2010	11:33:30 AM	Bubbler valve opened
6/3/2010	11:33:30 AM	Helium MFC set to  0.000000
6/3/2010	11:33:30 AM	H2 MFC set to  500.000000
6/3/2010	11:33:30 AM	BCl3 MFC set to  0.000000
6/3/2010	11:33:30 AM	PHl3 MFC set to  0.000000
6/3/2010	11:33:30 AM	SiCl4 MFC set to  50.000000
6/3/2010	11:33:30 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	11:33:30 AM	Tube furnace set to 1000
6/3/2010	11:53:30 AM	H2 valve closed
6/3/2010	11:53:30 AM	BCl3 valve closed
6/3/2010	11:53:30 AM	PH3 valve closed
6/3/2010	11:53:30 AM	SiCl4 pre valve closed
6/3/2010	11:53:30 AM	SiCl4 post valve closed
6/3/2010	11:53:30 AM	Main Vac valve closed
6/3/2010	11:53:30 AM	Bypass valve closed
6/3/2010	11:53:30 AM	Helium valve opened
6/3/2010	11:53:30 AM	Bubbler valve opened
6/3/2010	11:53:30 AM	Helium MFC set to  500.000000
6/3/2010	11:53:30 AM	H2 MFC set to  0.000000
6/3/2010	11:53:30 AM	BCl3 MFC set to  0.000000
6/3/2010	11:53:30 AM	PHl3 MFC set to  0.000000
6/3/2010	11:53:30 AM	SiCl4 MFC set to  0.000000
6/3/2010	11:53:30 AM	Bypass solenoid MFC set to  0.000000
6/3/2010	11:53:30 AM	Tube furnace set to 0
6/3/2010	12:13:30 PM	Helium valve closed
6/3/2010	12:13:30 PM	H2 valve closed
6/3/2010	12:13:30 PM	BCl3 valve closed
6/3/2010	12:13:30 PM	PH3 valve closed
6/3/2010	12:13:30 PM	SiCl4 pre valve closed
6/3/2010	12:13:30 PM	SiCl4 post valve closed
6/3/2010	12:13:30 PM	Main Vac valve closed
6/3/2010	12:13:30 PM	Bypass valve closed
6/3/2010	12:13:30 PM	Bubbler valve closed
6/3/2010	12:13:30 PM	Helium MFC set to  0.000000
6/3/2010	12:13:30 PM	H2 MFC set to  0.000000
6/3/2010	12:13:30 PM	BCl3 MFC set to  0.000000
6/3/2010	12:13:30 PM	PHl3 MFC set to  0.000000
6/3/2010	12:13:30 PM	SiCl4 MFC set to  0.000000
6/3/2010	12:13:30 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	12:13:30 PM	Tube furnace set to 0
6/3/2010	12:13:30 PM	Run finished at 12:13 PM
6/3/2010	12:13:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	12:13:44 PM	Recipe started at 12:13 PM
6/3/2010	12:13:44 PM	Helium valve closed
6/3/2010	12:13:44 PM	H2 valve closed
6/3/2010	12:13:44 PM	BCl3 valve closed
6/3/2010	12:13:44 PM	PH3 valve closed
6/3/2010	12:13:44 PM	SiCl4 pre valve closed
6/3/2010	12:13:44 PM	SiCl4 post valve closed
6/3/2010	12:13:44 PM	Main Vac valve closed
6/3/2010	12:13:44 PM	Bubbler valve closed
6/3/2010	12:13:44 PM	Bypass valve opened
6/3/2010	12:13:44 PM	Helium MFC set to  0.000000
6/3/2010	12:13:44 PM	H2 MFC set to  0.000000
6/3/2010	12:13:44 PM	BCl3 MFC set to  0.000000
6/3/2010	12:13:44 PM	PHl3 MFC set to  0.000000
6/3/2010	12:13:44 PM	SiCl4 MFC set to  0.000000
6/3/2010	12:13:44 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	12:13:44 PM	Tube furnace set to 0
6/3/2010	12:14:19 PM	Helium valve closed
6/3/2010	12:14:19 PM	H2 valve closed
6/3/2010	12:14:19 PM	BCl3 valve closed
6/3/2010	12:14:19 PM	PH3 valve closed
6/3/2010	12:14:19 PM	SiCl4 pre valve closed
6/3/2010	12:14:19 PM	SiCl4 post valve closed
6/3/2010	12:14:19 PM	Bubbler valve closed
6/3/2010	12:14:19 PM	Main Vac valve opened
6/3/2010	12:14:19 PM	Bypass valve opened
6/3/2010	12:14:19 PM	Helium MFC set to  0.000000
6/3/2010	12:14:19 PM	H2 MFC set to  0.000000
6/3/2010	12:14:19 PM	BCl3 MFC set to  0.000000
6/3/2010	12:14:19 PM	PHl3 MFC set to  0.000000
6/3/2010	12:14:19 PM	SiCl4 MFC set to  0.000000
6/3/2010	12:14:19 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	12:14:19 PM	Tube furnace set to 0
6/3/2010	12:14:19 PM	Run finished at 12:14 PM
6/3/2010	12:14:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	12:47:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2010	12:47:36 PM	Recipe started at 12:47 PM
6/3/2010	12:47:36 PM	H2 valve closed
6/3/2010	12:47:36 PM	BCl3 valve closed
6/3/2010	12:47:36 PM	PH3 valve closed
6/3/2010	12:47:36 PM	SiCl4 pre valve closed
6/3/2010	12:47:36 PM	SiCl4 post valve closed
6/3/2010	12:47:36 PM	Main Vac valve closed
6/3/2010	12:47:36 PM	Bypass valve closed
6/3/2010	12:47:36 PM	Bubbler valve closed
6/3/2010	12:47:36 PM	Helium valve opened
6/3/2010	12:47:36 PM	Helium MFC set to  500.000000
6/3/2010	12:47:36 PM	H2 MFC set to  0.000000
6/3/2010	12:47:36 PM	BCl3 MFC set to  0.000000
6/3/2010	12:47:36 PM	PHl3 MFC set to  0.000000
6/3/2010	12:47:36 PM	SiCl4 MFC set to  0.000000
6/3/2010	12:47:36 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	12:47:36 PM	Tube furnace set to 0
6/3/2010	12:48:56 PM	Helium valve closed
6/3/2010	12:48:56 PM	H2 valve closed
6/3/2010	12:48:56 PM	BCl3 valve closed
6/3/2010	12:48:56 PM	PH3 valve closed
6/3/2010	12:48:56 PM	SiCl4 pre valve closed
6/3/2010	12:48:56 PM	SiCl4 post valve closed
6/3/2010	12:48:56 PM	Main Vac valve closed
6/3/2010	12:48:56 PM	Bypass valve closed
6/3/2010	12:48:56 PM	Bubbler valve closed
6/3/2010	12:48:56 PM	Helium MFC set to  0.000000
6/3/2010	12:48:56 PM	H2 MFC set to  0.000000
6/3/2010	12:48:56 PM	BCl3 MFC set to  0.000000
6/3/2010	12:48:56 PM	PHl3 MFC set to  0.000000
6/3/2010	12:48:56 PM	SiCl4 MFC set to  0.000000
6/3/2010	12:48:56 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	12:48:56 PM	Tube furnace set to 0
6/3/2010	12:48:57 PM	Run finished at 12:48 PM
6/3/2010	12:48:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2010	12:53:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	12:53:32 PM	Recipe started at 12:53 PM
6/3/2010	12:53:32 PM	Helium valve closed
6/3/2010	12:53:32 PM	H2 valve closed
6/3/2010	12:53:32 PM	BCl3 valve closed
6/3/2010	12:53:32 PM	PH3 valve closed
6/3/2010	12:53:32 PM	SiCl4 pre valve closed
6/3/2010	12:53:32 PM	SiCl4 post valve closed
6/3/2010	12:53:32 PM	Main Vac valve closed
6/3/2010	12:53:32 PM	Bubbler valve closed
6/3/2010	12:53:32 PM	Bypass valve opened
6/3/2010	12:53:32 PM	Helium MFC set to  0.000000
6/3/2010	12:53:32 PM	H2 MFC set to  0.000000
6/3/2010	12:53:32 PM	BCl3 MFC set to  0.000000
6/3/2010	12:53:32 PM	PHl3 MFC set to  0.000000
6/3/2010	12:53:32 PM	SiCl4 MFC set to  0.000000
6/3/2010	12:53:32 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	12:53:32 PM	Tube furnace set to 0
6/3/2010	12:54:19 PM	Helium valve closed
6/3/2010	12:54:19 PM	H2 valve closed
6/3/2010	12:54:19 PM	BCl3 valve closed
6/3/2010	12:54:19 PM	PH3 valve closed
6/3/2010	12:54:19 PM	SiCl4 pre valve closed
6/3/2010	12:54:19 PM	SiCl4 post valve closed
6/3/2010	12:54:19 PM	Bubbler valve closed
6/3/2010	12:54:19 PM	Main Vac valve opened
6/3/2010	12:54:19 PM	Bypass valve opened
6/3/2010	12:54:19 PM	Helium MFC set to  0.000000
6/3/2010	12:54:19 PM	H2 MFC set to  0.000000
6/3/2010	12:54:19 PM	BCl3 MFC set to  0.000000
6/3/2010	12:54:19 PM	PHl3 MFC set to  0.000000
6/3/2010	12:54:19 PM	SiCl4 MFC set to  0.000000
6/3/2010	12:54:19 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	12:54:20 PM	Tube furnace set to 0
6/3/2010	12:54:20 PM	Run finished at 12:54 PM
6/3/2010	12:54:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	12:54:36 PM	Helium MFC set to  100.000000
6/3/2010	12:54:36 PM	Helium valve opened
6/3/2010	12:56:03 PM	Helium valve closed
6/3/2010	12:56:07 PM	Helium MFC set to  50.000000
6/3/2010	12:56:08 PM	Helium valve opened
6/3/2010	1:05:43 PM	Helium valve closed
6/3/2010	1:14:27 PM	Helium valve opened
6/3/2010	1:21:19 PM	Helium valve closed
6/3/2010	1:23:19 PM	Helium valve opened
6/3/2010	1:37:00 PM	Helium valve closed
6/3/2010	1:37:40 PM	Recipe started at 1:37 PM
6/3/2010	1:37:40 PM	Helium valve closed
6/3/2010	1:37:40 PM	BCl3 valve closed
6/3/2010	1:37:40 PM	PH3 valve closed
6/3/2010	1:37:40 PM	SiCl4 pre valve closed
6/3/2010	1:37:40 PM	SiCl4 post valve closed
6/3/2010	1:37:40 PM	Main Vac valve closed
6/3/2010	1:37:40 PM	Bypass valve closed
6/3/2010	1:37:40 PM	Bubbler valve closed
6/3/2010	1:37:40 PM	H2 valve opened
6/3/2010	1:37:40 PM	Helium MFC set to  0.000000
6/3/2010	1:37:40 PM	H2 MFC set to  500.000000
6/3/2010	1:37:40 PM	BCl3 MFC set to  0.000000
6/3/2010	1:37:40 PM	PHl3 MFC set to  0.000000
6/3/2010	1:37:40 PM	SiCl4 MFC set to  0.000000
6/3/2010	1:37:40 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	1:37:40 PM	Tube furnace set to 0
6/3/2010	1:39:03 PM	Helium valve closed
6/3/2010	1:39:03 PM	BCl3 valve closed
6/3/2010	1:39:03 PM	PH3 valve closed
6/3/2010	1:39:03 PM	SiCl4 pre valve closed
6/3/2010	1:39:03 PM	SiCl4 post valve closed
6/3/2010	1:39:03 PM	Main Vac valve closed
6/3/2010	1:39:03 PM	Bypass valve closed
6/3/2010	1:39:03 PM	H2 valve opened
6/3/2010	1:39:03 PM	Bubbler valve opened
6/3/2010	1:39:03 PM	Helium MFC set to  0.000000
6/3/2010	1:39:03 PM	H2 MFC set to  500.000000
6/3/2010	1:39:03 PM	BCl3 MFC set to  0.000000
6/3/2010	1:39:03 PM	PHl3 MFC set to  0.000000
6/3/2010	1:39:03 PM	SiCl4 MFC set to  0.000000
6/3/2010	1:39:03 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	1:39:03 PM	Tube furnace set to 1000
6/3/2010	1:59:03 PM	Helium valve closed
6/3/2010	1:59:03 PM	BCl3 valve closed
6/3/2010	1:59:03 PM	PH3 valve closed
6/3/2010	1:59:03 PM	Main Vac valve closed
6/3/2010	1:59:03 PM	Bypass valve closed
6/3/2010	1:59:03 PM	H2 valve opened
6/3/2010	1:59:03 PM	SiCl4 pre valve opened
6/3/2010	1:59:03 PM	SiCl4 post valve opened
6/3/2010	1:59:03 PM	Bubbler valve opened
6/3/2010	1:59:03 PM	Helium MFC set to  0.000000
6/3/2010	1:59:03 PM	H2 MFC set to  500.000000
6/3/2010	1:59:03 PM	BCl3 MFC set to  0.000000
6/3/2010	1:59:03 PM	PHl3 MFC set to  0.000000
6/3/2010	1:59:03 PM	SiCl4 MFC set to  50.000000
6/3/2010	1:59:03 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	1:59:03 PM	Tube furnace set to 1000
6/3/2010	2:19:03 PM	H2 valve closed
6/3/2010	2:19:03 PM	BCl3 valve closed
6/3/2010	2:19:03 PM	PH3 valve closed
6/3/2010	2:19:03 PM	SiCl4 pre valve closed
6/3/2010	2:19:03 PM	SiCl4 post valve closed
6/3/2010	2:19:03 PM	Main Vac valve closed
6/3/2010	2:19:03 PM	Bypass valve closed
6/3/2010	2:19:03 PM	Helium valve opened
6/3/2010	2:19:03 PM	Bubbler valve opened
6/3/2010	2:19:03 PM	Helium MFC set to  500.000000
6/3/2010	2:19:03 PM	H2 MFC set to  0.000000
6/3/2010	2:19:03 PM	BCl3 MFC set to  0.000000
6/3/2010	2:19:03 PM	PHl3 MFC set to  0.000000
6/3/2010	2:19:03 PM	SiCl4 MFC set to  0.000000
6/3/2010	2:19:03 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	2:19:03 PM	Tube furnace set to 0
6/3/2010	2:37:57 PM	Helium valve closed
6/3/2010	2:37:57 PM	H2 valve closed
6/3/2010	2:37:57 PM	BCl3 valve closed
6/3/2010	2:37:57 PM	PH3 valve closed
6/3/2010	2:37:57 PM	SiCl4 pre valve closed
6/3/2010	2:37:57 PM	SiCl4 post valve closed
6/3/2010	2:37:57 PM	Main Vac valve closed
6/3/2010	2:37:57 PM	Bypass valve closed
6/3/2010	2:37:57 PM	Bubbler valve closed
6/3/2010	2:37:57 PM	Helium MFC set to  0.000000
6/3/2010	2:37:57 PM	H2 MFC set to  0.000000
6/3/2010	2:37:57 PM	BCl3 MFC set to  0.000000
6/3/2010	2:37:57 PM	PHl3 MFC set to  0.000000
6/3/2010	2:37:57 PM	SiCl4 MFC set to  0.000000
6/3/2010	2:37:57 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	2:37:57 PM	Tube furnace set to 0
6/3/2010	2:37:58 PM	Run finished at 2:37 PM
6/3/2010	2:41:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	2:41:09 PM	Recipe started at 2:41 PM
6/3/2010	2:41:09 PM	Helium valve closed
6/3/2010	2:41:09 PM	H2 valve closed
6/3/2010	2:41:09 PM	BCl3 valve closed
6/3/2010	2:41:09 PM	PH3 valve closed
6/3/2010	2:41:09 PM	SiCl4 pre valve closed
6/3/2010	2:41:09 PM	SiCl4 post valve closed
6/3/2010	2:41:09 PM	Main Vac valve closed
6/3/2010	2:41:09 PM	Bubbler valve closed
6/3/2010	2:41:09 PM	Bypass valve opened
6/3/2010	2:41:09 PM	Helium MFC set to  0.000000
6/3/2010	2:41:09 PM	H2 MFC set to  0.000000
6/3/2010	2:41:09 PM	BCl3 MFC set to  0.000000
6/3/2010	2:41:09 PM	PHl3 MFC set to  0.000000
6/3/2010	2:41:09 PM	SiCl4 MFC set to  0.000000
6/3/2010	2:41:09 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	2:41:09 PM	Tube furnace set to 0
6/3/2010	2:41:57 PM	Helium valve closed
6/3/2010	2:41:57 PM	H2 valve closed
6/3/2010	2:41:57 PM	BCl3 valve closed
6/3/2010	2:41:57 PM	PH3 valve closed
6/3/2010	2:41:57 PM	SiCl4 pre valve closed
6/3/2010	2:41:57 PM	SiCl4 post valve closed
6/3/2010	2:41:57 PM	Bubbler valve closed
6/3/2010	2:41:57 PM	Main Vac valve opened
6/3/2010	2:41:57 PM	Bypass valve opened
6/3/2010	2:41:57 PM	Helium MFC set to  0.000000
6/3/2010	2:41:57 PM	H2 MFC set to  0.000000
6/3/2010	2:41:57 PM	BCl3 MFC set to  0.000000
6/3/2010	2:41:57 PM	PHl3 MFC set to  0.000000
6/3/2010	2:41:57 PM	SiCl4 MFC set to  0.000000
6/3/2010	2:41:57 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	2:41:57 PM	Tube furnace set to 0
6/3/2010	2:41:57 PM	Run finished at 2:41 PM
6/3/2010	2:41:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	2:43:10 PM	Helium MFC set to  75.000000
6/3/2010	2:43:10 PM	Helium valve opened
6/3/2010	2:53:13 PM	Helium valve closed
6/3/2010	2:54:19 PM	Helium valve opened
6/3/2010	3:04:11 PM	Helium valve closed
6/3/2010	3:05:08 PM	Recipe started at 3:05 PM
6/3/2010	3:05:08 PM	Helium valve closed
6/3/2010	3:05:08 PM	BCl3 valve closed
6/3/2010	3:05:08 PM	PH3 valve closed
6/3/2010	3:05:08 PM	SiCl4 pre valve closed
6/3/2010	3:05:08 PM	SiCl4 post valve closed
6/3/2010	3:05:08 PM	Main Vac valve closed
6/3/2010	3:05:08 PM	Bypass valve closed
6/3/2010	3:05:08 PM	Bubbler valve closed
6/3/2010	3:05:08 PM	H2 valve opened
6/3/2010	3:05:08 PM	Helium MFC set to  0.000000
6/3/2010	3:05:08 PM	H2 MFC set to  500.000000
6/3/2010	3:05:08 PM	BCl3 MFC set to  0.000000
6/3/2010	3:05:08 PM	PHl3 MFC set to  0.000000
6/3/2010	3:05:08 PM	SiCl4 MFC set to  0.000000
6/3/2010	3:05:08 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	3:05:08 PM	Tube furnace set to 0
6/3/2010	3:06:26 PM	Helium valve closed
6/3/2010	3:06:26 PM	BCl3 valve closed
6/3/2010	3:06:26 PM	PH3 valve closed
6/3/2010	3:06:26 PM	SiCl4 pre valve closed
6/3/2010	3:06:26 PM	SiCl4 post valve closed
6/3/2010	3:06:26 PM	Main Vac valve closed
6/3/2010	3:06:26 PM	Bypass valve closed
6/3/2010	3:06:26 PM	H2 valve opened
6/3/2010	3:06:26 PM	Bubbler valve opened
6/3/2010	3:06:26 PM	Helium MFC set to  0.000000
6/3/2010	3:06:26 PM	H2 MFC set to  500.000000
6/3/2010	3:06:26 PM	BCl3 MFC set to  0.000000
6/3/2010	3:06:26 PM	PHl3 MFC set to  0.000000
6/3/2010	3:06:26 PM	SiCl4 MFC set to  0.000000
6/3/2010	3:06:26 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	3:06:27 PM	Tube furnace set to 1000
6/3/2010	3:26:27 PM	Helium valve closed
6/3/2010	3:26:27 PM	BCl3 valve closed
6/3/2010	3:26:27 PM	Main Vac valve closed
6/3/2010	3:26:27 PM	Bypass valve closed
6/3/2010	3:26:27 PM	H2 valve opened
6/3/2010	3:26:27 PM	PH3 valve opened
6/3/2010	3:26:27 PM	SiCl4 pre valve opened
6/3/2010	3:26:27 PM	SiCl4 post valve opened
6/3/2010	3:26:27 PM	Bubbler valve opened
6/3/2010	3:26:27 PM	Helium MFC set to  0.000000
6/3/2010	3:26:27 PM	H2 MFC set to  500.000000
6/3/2010	3:26:27 PM	BCl3 MFC set to  0.000000
6/3/2010	3:26:27 PM	PHl3 MFC set to  2.000000
6/3/2010	3:26:27 PM	SiCl4 MFC set to  50.000000
6/3/2010	3:26:27 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	3:26:27 PM	Tube furnace set to 1000
6/3/2010	3:46:27 PM	H2 valve closed
6/3/2010	3:46:27 PM	BCl3 valve closed
6/3/2010	3:46:27 PM	PH3 valve closed
6/3/2010	3:46:27 PM	SiCl4 pre valve closed
6/3/2010	3:46:27 PM	SiCl4 post valve closed
6/3/2010	3:46:27 PM	Main Vac valve closed
6/3/2010	3:46:27 PM	Bypass valve closed
6/3/2010	3:46:27 PM	Helium valve opened
6/3/2010	3:46:27 PM	Bubbler valve opened
6/3/2010	3:46:27 PM	Helium MFC set to  500.000000
6/3/2010	3:46:27 PM	H2 MFC set to  0.000000
6/3/2010	3:46:27 PM	BCl3 MFC set to  0.000000
6/3/2010	3:46:27 PM	PHl3 MFC set to  0.000000
6/3/2010	3:46:27 PM	SiCl4 MFC set to  0.000000
6/3/2010	3:46:27 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	3:46:27 PM	Tube furnace set to 0
6/3/2010	4:06:27 PM	Helium valve closed
6/3/2010	4:06:27 PM	H2 valve closed
6/3/2010	4:06:27 PM	BCl3 valve closed
6/3/2010	4:06:27 PM	PH3 valve closed
6/3/2010	4:06:27 PM	SiCl4 pre valve closed
6/3/2010	4:06:27 PM	SiCl4 post valve closed
6/3/2010	4:06:27 PM	Main Vac valve closed
6/3/2010	4:06:27 PM	Bypass valve closed
6/3/2010	4:06:27 PM	Bubbler valve closed
6/3/2010	4:06:27 PM	Helium MFC set to  0.000000
6/3/2010	4:06:27 PM	H2 MFC set to  0.000000
6/3/2010	4:06:27 PM	BCl3 MFC set to  0.000000
6/3/2010	4:06:27 PM	PHl3 MFC set to  0.000000
6/3/2010	4:06:27 PM	SiCl4 MFC set to  0.000000
6/3/2010	4:06:27 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	4:06:27 PM	Tube furnace set to 0
6/3/2010	4:06:27 PM	Run finished at 4:06 PM
6/3/2010	5:00:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	5:00:56 PM	Recipe started at 5:00 PM
6/3/2010	5:00:56 PM	Helium valve closed
6/3/2010	5:00:56 PM	H2 valve closed
6/3/2010	5:00:56 PM	BCl3 valve closed
6/3/2010	5:00:56 PM	PH3 valve closed
6/3/2010	5:00:56 PM	SiCl4 pre valve closed
6/3/2010	5:00:56 PM	SiCl4 post valve closed
6/3/2010	5:00:56 PM	Main Vac valve closed
6/3/2010	5:00:56 PM	Bubbler valve closed
6/3/2010	5:00:56 PM	Bypass valve opened
6/3/2010	5:00:56 PM	Helium MFC set to  0.000000
6/3/2010	5:00:56 PM	H2 MFC set to  0.000000
6/3/2010	5:00:56 PM	BCl3 MFC set to  0.000000
6/3/2010	5:00:56 PM	PHl3 MFC set to  0.000000
6/3/2010	5:00:56 PM	SiCl4 MFC set to  0.000000
6/3/2010	5:00:56 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	5:00:57 PM	Tube furnace set to 0
6/3/2010	5:01:54 PM	Helium valve closed
6/3/2010	5:01:54 PM	H2 valve closed
6/3/2010	5:01:54 PM	BCl3 valve closed
6/3/2010	5:01:54 PM	PH3 valve closed
6/3/2010	5:01:54 PM	SiCl4 pre valve closed
6/3/2010	5:01:54 PM	SiCl4 post valve closed
6/3/2010	5:01:54 PM	Bubbler valve closed
6/3/2010	5:01:54 PM	Main Vac valve opened
6/3/2010	5:01:54 PM	Bypass valve opened
6/3/2010	5:01:54 PM	Helium MFC set to  0.000000
6/3/2010	5:01:54 PM	H2 MFC set to  0.000000
6/3/2010	5:01:54 PM	BCl3 MFC set to  0.000000
6/3/2010	5:01:54 PM	PHl3 MFC set to  0.000000
6/3/2010	5:01:54 PM	SiCl4 MFC set to  0.000000
6/3/2010	5:01:54 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	5:01:54 PM	Tube furnace set to 0
6/3/2010	5:01:54 PM	Run finished at 5:01 PM
6/3/2010	5:01:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	5:02:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2010	5:02:00 PM	Recipe started at 5:02 PM
6/3/2010	5:02:00 PM	H2 valve closed
6/3/2010	5:02:00 PM	BCl3 valve closed
6/3/2010	5:02:00 PM	PH3 valve closed
6/3/2010	5:02:00 PM	SiCl4 pre valve closed
6/3/2010	5:02:00 PM	SiCl4 post valve closed
6/3/2010	5:02:00 PM	Main Vac valve closed
6/3/2010	5:02:00 PM	Bypass valve closed
6/3/2010	5:02:00 PM	Bubbler valve closed
6/3/2010	5:02:00 PM	Helium valve opened
6/3/2010	5:02:00 PM	Helium MFC set to  500.000000
6/3/2010	5:02:00 PM	H2 MFC set to  0.000000
6/3/2010	5:02:00 PM	BCl3 MFC set to  0.000000
6/3/2010	5:02:00 PM	PHl3 MFC set to  0.000000
6/3/2010	5:02:00 PM	SiCl4 MFC set to  0.000000
6/3/2010	5:02:00 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	5:02:01 PM	Tube furnace set to 0
6/3/2010	5:02:38 PM	Helium valve closed
6/3/2010	5:02:38 PM	H2 valve closed
6/3/2010	5:02:38 PM	BCl3 valve closed
6/3/2010	5:02:38 PM	PH3 valve closed
6/3/2010	5:02:38 PM	SiCl4 pre valve closed
6/3/2010	5:02:38 PM	SiCl4 post valve closed
6/3/2010	5:02:38 PM	Main Vac valve closed
6/3/2010	5:02:38 PM	Bypass valve closed
6/3/2010	5:02:38 PM	Bubbler valve closed
6/3/2010	5:02:38 PM	Helium MFC set to  0.000000
6/3/2010	5:02:38 PM	H2 MFC set to  0.000000
6/3/2010	5:02:38 PM	BCl3 MFC set to  0.000000
6/3/2010	5:02:38 PM	PHl3 MFC set to  0.000000
6/3/2010	5:02:38 PM	SiCl4 MFC set to  0.000000
6/3/2010	5:02:38 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	5:02:38 PM	Tube furnace set to 0
6/3/2010	5:02:38 PM	Run finished at 5:02 PM
6/3/2010	5:02:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2010	5:05:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	5:05:19 PM	Recipe started at 5:05 PM
6/3/2010	5:05:19 PM	Helium valve closed
6/3/2010	5:05:19 PM	H2 valve closed
6/3/2010	5:05:19 PM	BCl3 valve closed
6/3/2010	5:05:19 PM	PH3 valve closed
6/3/2010	5:05:19 PM	SiCl4 pre valve closed
6/3/2010	5:05:19 PM	SiCl4 post valve closed
6/3/2010	5:05:19 PM	Main Vac valve closed
6/3/2010	5:05:19 PM	Bubbler valve closed
6/3/2010	5:05:19 PM	Bypass valve opened
6/3/2010	5:05:19 PM	Helium MFC set to  0.000000
6/3/2010	5:05:19 PM	H2 MFC set to  0.000000
6/3/2010	5:05:19 PM	BCl3 MFC set to  0.000000
6/3/2010	5:05:19 PM	PHl3 MFC set to  0.000000
6/3/2010	5:05:19 PM	SiCl4 MFC set to  0.000000
6/3/2010	5:05:19 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	5:05:19 PM	Tube furnace set to 0
6/3/2010	5:06:01 PM	Run aborted at 5:06 PM
6/3/2010	5:06:01 PM	Helium valve closed
6/3/2010	5:06:01 PM	H2 valve closed
6/3/2010	5:06:01 PM	BCl3 valve closed
6/3/2010	5:06:01 PM	PH3 valve closed
6/3/2010	5:06:01 PM	SiCl4 pre valve closed
6/3/2010	5:06:01 PM	SiCl4 post valve closed
6/3/2010	5:06:01 PM	Bypass valve closed
6/3/2010	5:06:01 PM	Main Vac valve closed
6/3/2010	5:06:01 PM	Bubbler valve closed
6/3/2010	5:06:01 PM	Helium MFC set to  0.000000
6/3/2010	5:06:01 PM	H2 MFC set to  0.000000
6/3/2010	5:06:01 PM	BCl3 MFC set to  0.000000
6/3/2010	5:06:01 PM	PHl3 MFC set to  0.000000
6/3/2010	5:06:01 PM	SiCl4 MFC set to  0.000000
6/3/2010	5:06:01 PM	Tube furnace set to 0
6/3/2010	5:06:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	5:06:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2010	5:06:08 PM	Recipe started at 5:06 PM
6/3/2010	5:06:08 PM	H2 valve closed
6/3/2010	5:06:08 PM	BCl3 valve closed
6/3/2010	5:06:08 PM	PH3 valve closed
6/3/2010	5:06:08 PM	SiCl4 pre valve closed
6/3/2010	5:06:08 PM	SiCl4 post valve closed
6/3/2010	5:06:08 PM	Main Vac valve closed
6/3/2010	5:06:08 PM	Bypass valve closed
6/3/2010	5:06:08 PM	Bubbler valve closed
6/3/2010	5:06:08 PM	Helium valve opened
6/3/2010	5:06:08 PM	Helium MFC set to  500.000000
6/3/2010	5:06:08 PM	H2 MFC set to  0.000000
6/3/2010	5:06:08 PM	BCl3 MFC set to  0.000000
6/3/2010	5:06:08 PM	PHl3 MFC set to  0.000000
6/3/2010	5:06:08 PM	SiCl4 MFC set to  0.000000
6/3/2010	5:06:08 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	5:06:08 PM	Tube furnace set to 0
6/3/2010	5:07:19 PM	Helium valve closed
6/3/2010	5:07:19 PM	H2 valve closed
6/3/2010	5:07:19 PM	BCl3 valve closed
6/3/2010	5:07:19 PM	PH3 valve closed
6/3/2010	5:07:19 PM	SiCl4 pre valve closed
6/3/2010	5:07:20 PM	SiCl4 post valve closed
6/3/2010	5:07:20 PM	Main Vac valve closed
6/3/2010	5:07:20 PM	Bypass valve closed
6/3/2010	5:07:20 PM	Bubbler valve closed
6/3/2010	5:07:20 PM	Helium MFC set to  0.000000
6/3/2010	5:07:20 PM	H2 MFC set to  0.000000
6/3/2010	5:07:20 PM	BCl3 MFC set to  0.000000
6/3/2010	5:07:20 PM	PHl3 MFC set to  0.000000
6/3/2010	5:07:20 PM	SiCl4 MFC set to  0.000000
6/3/2010	5:07:20 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	5:07:20 PM	Tube furnace set to 0
6/3/2010	5:07:20 PM	Run finished at 5:07 PM
6/3/2010	5:07:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2010	5:10:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	5:10:38 PM	Recipe started at 5:10 PM
6/3/2010	5:10:38 PM	Helium valve closed
6/3/2010	5:10:38 PM	H2 valve closed
6/3/2010	5:10:38 PM	BCl3 valve closed
6/3/2010	5:10:38 PM	PH3 valve closed
6/3/2010	5:10:38 PM	SiCl4 pre valve closed
6/3/2010	5:10:38 PM	SiCl4 post valve closed
6/3/2010	5:10:38 PM	Main Vac valve closed
6/3/2010	5:10:38 PM	Bubbler valve closed
6/3/2010	5:10:38 PM	Bypass valve opened
6/3/2010	5:10:38 PM	Helium MFC set to  0.000000
6/3/2010	5:10:38 PM	H2 MFC set to  0.000000
6/3/2010	5:10:38 PM	BCl3 MFC set to  0.000000
6/3/2010	5:10:38 PM	PHl3 MFC set to  0.000000
6/3/2010	5:10:38 PM	SiCl4 MFC set to  0.000000
6/3/2010	5:10:38 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	5:10:38 PM	Tube furnace set to 0
6/3/2010	5:11:25 PM	Helium valve closed
6/3/2010	5:11:25 PM	H2 valve closed
6/3/2010	5:11:25 PM	BCl3 valve closed
6/3/2010	5:11:25 PM	PH3 valve closed
6/3/2010	5:11:25 PM	SiCl4 pre valve closed
6/3/2010	5:11:25 PM	SiCl4 post valve closed
6/3/2010	5:11:25 PM	Bubbler valve closed
6/3/2010	5:11:25 PM	Main Vac valve opened
6/3/2010	5:11:25 PM	Bypass valve opened
6/3/2010	5:11:25 PM	Helium MFC set to  0.000000
6/3/2010	5:11:25 PM	H2 MFC set to  0.000000
6/3/2010	5:11:25 PM	BCl3 MFC set to  0.000000
6/3/2010	5:11:25 PM	PHl3 MFC set to  0.000000
6/3/2010	5:11:25 PM	SiCl4 MFC set to  0.000000
6/3/2010	5:11:25 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	5:11:25 PM	Tube furnace set to 0
6/3/2010	5:11:26 PM	Run finished at 5:11 PM
6/3/2010	5:11:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	5:11:33 PM	Helium MFC set to  75.000000
6/3/2010	5:11:34 PM	Helium valve opened
6/3/2010	5:15:08 PM	Helium valve closed
6/3/2010	5:15:40 PM	Helium valve opened
6/3/2010	5:15:51 PM	Helium valve closed
6/3/2010	5:15:55 PM	Helium MFC set to  100.000000
6/3/2010	5:15:55 PM	Helium valve opened
6/3/2010	5:25:04 PM	Helium valve closed
6/3/2010	5:26:39 PM	Helium valve opened
6/3/2010	5:34:51 PM	Helium valve closed
6/3/2010	5:36:13 PM	Recipe started at 5:36 PM
6/3/2010	5:36:13 PM	Helium valve closed
6/3/2010	5:36:13 PM	BCl3 valve closed
6/3/2010	5:36:13 PM	PH3 valve closed
6/3/2010	5:36:13 PM	SiCl4 pre valve closed
6/3/2010	5:36:13 PM	SiCl4 post valve closed
6/3/2010	5:36:13 PM	Main Vac valve closed
6/3/2010	5:36:13 PM	Bypass valve closed
6/3/2010	5:36:13 PM	Bubbler valve closed
6/3/2010	5:36:13 PM	H2 valve opened
6/3/2010	5:36:13 PM	Helium MFC set to  0.000000
6/3/2010	5:36:13 PM	H2 MFC set to  500.000000
6/3/2010	5:36:13 PM	BCl3 MFC set to  0.000000
6/3/2010	5:36:13 PM	PHl3 MFC set to  0.000000
6/3/2010	5:36:13 PM	SiCl4 MFC set to  0.000000
6/3/2010	5:36:13 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	5:36:13 PM	Tube furnace set to 0
6/3/2010	5:37:34 PM	Helium valve closed
6/3/2010	5:37:34 PM	BCl3 valve closed
6/3/2010	5:37:34 PM	PH3 valve closed
6/3/2010	5:37:34 PM	SiCl4 pre valve closed
6/3/2010	5:37:34 PM	SiCl4 post valve closed
6/3/2010	5:37:34 PM	Main Vac valve closed
6/3/2010	5:37:34 PM	Bypass valve closed
6/3/2010	5:37:34 PM	H2 valve opened
6/3/2010	5:37:34 PM	Bubbler valve opened
6/3/2010	5:37:34 PM	Helium MFC set to  0.000000
6/3/2010	5:37:34 PM	H2 MFC set to  500.000000
6/3/2010	5:37:34 PM	BCl3 MFC set to  0.000000
6/3/2010	5:37:34 PM	PHl3 MFC set to  0.000000
6/3/2010	5:37:34 PM	SiCl4 MFC set to  0.000000
6/3/2010	5:37:34 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	5:37:34 PM	Tube furnace set to 1000
6/3/2010	5:59:14 PM	Helium valve closed
6/3/2010	5:59:14 PM	BCl3 valve closed
6/3/2010	5:59:14 PM	Main Vac valve closed
6/3/2010	5:59:14 PM	Bypass valve closed
6/3/2010	5:59:14 PM	H2 valve opened
6/3/2010	5:59:14 PM	PH3 valve opened
6/3/2010	5:59:14 PM	SiCl4 pre valve opened
6/3/2010	5:59:14 PM	SiCl4 post valve opened
6/3/2010	5:59:14 PM	Bubbler valve opened
6/3/2010	5:59:14 PM	Helium MFC set to  0.000000
6/3/2010	5:59:14 PM	H2 MFC set to  500.000000
6/3/2010	5:59:14 PM	BCl3 MFC set to  0.000000
6/3/2010	5:59:14 PM	PHl3 MFC set to  10.000000
6/3/2010	5:59:14 PM	SiCl4 MFC set to  50.000000
6/3/2010	5:59:14 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	5:59:14 PM	Tube furnace set to 1000
6/3/2010	6:19:14 PM	H2 valve closed
6/3/2010	6:19:14 PM	BCl3 valve closed
6/3/2010	6:19:14 PM	PH3 valve closed
6/3/2010	6:19:14 PM	SiCl4 pre valve closed
6/3/2010	6:19:14 PM	SiCl4 post valve closed
6/3/2010	6:19:14 PM	Main Vac valve closed
6/3/2010	6:19:14 PM	Bypass valve closed
6/3/2010	6:19:14 PM	Helium valve opened
6/3/2010	6:19:14 PM	Bubbler valve opened
6/3/2010	6:19:14 PM	Helium MFC set to  500.000000
6/3/2010	6:19:14 PM	H2 MFC set to  0.000000
6/3/2010	6:19:14 PM	BCl3 MFC set to  0.000000
6/3/2010	6:19:14 PM	PHl3 MFC set to  0.000000
6/3/2010	6:19:14 PM	SiCl4 MFC set to  0.000000
6/3/2010	6:19:14 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	6:19:15 PM	Tube furnace set to 0
6/3/2010	6:39:11 PM	Helium valve closed
6/3/2010	6:39:11 PM	H2 valve closed
6/3/2010	6:39:11 PM	BCl3 valve closed
6/3/2010	6:39:11 PM	PH3 valve closed
6/3/2010	6:39:11 PM	SiCl4 pre valve closed
6/3/2010	6:39:11 PM	SiCl4 post valve closed
6/3/2010	6:39:11 PM	Main Vac valve closed
6/3/2010	6:39:11 PM	Bypass valve closed
6/3/2010	6:39:11 PM	Bubbler valve closed
6/3/2010	6:39:11 PM	Helium MFC set to  0.000000
6/3/2010	6:39:11 PM	H2 MFC set to  0.000000
6/3/2010	6:39:11 PM	BCl3 MFC set to  0.000000
6/3/2010	6:39:11 PM	PHl3 MFC set to  0.000000
6/3/2010	6:39:11 PM	SiCl4 MFC set to  0.000000
6/3/2010	6:39:11 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	6:39:11 PM	Tube furnace set to 0
6/3/2010	6:39:11 PM	Run finished at 6:39 PM
6/3/2010	6:42:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	6:42:55 PM	Recipe started at 6:42 PM
6/3/2010	6:42:55 PM	Helium valve closed
6/3/2010	6:42:55 PM	H2 valve closed
6/3/2010	6:42:55 PM	BCl3 valve closed
6/3/2010	6:42:55 PM	PH3 valve closed
6/3/2010	6:42:55 PM	SiCl4 pre valve closed
6/3/2010	6:42:55 PM	SiCl4 post valve closed
6/3/2010	6:42:55 PM	Main Vac valve closed
6/3/2010	6:42:55 PM	Bubbler valve closed
6/3/2010	6:42:55 PM	Bypass valve opened
6/3/2010	6:42:55 PM	Helium MFC set to  0.000000
6/3/2010	6:42:55 PM	H2 MFC set to  0.000000
6/3/2010	6:42:55 PM	BCl3 MFC set to  0.000000
6/3/2010	6:42:55 PM	PHl3 MFC set to  0.000000
6/3/2010	6:42:55 PM	SiCl4 MFC set to  0.000000
6/3/2010	6:42:55 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	6:42:55 PM	Tube furnace set to 0
6/3/2010	6:43:42 PM	Helium valve closed
6/3/2010	6:43:43 PM	H2 valve closed
6/3/2010	6:43:43 PM	BCl3 valve closed
6/3/2010	6:43:43 PM	PH3 valve closed
6/3/2010	6:43:43 PM	SiCl4 pre valve closed
6/3/2010	6:43:43 PM	SiCl4 post valve closed
6/3/2010	6:43:43 PM	Bubbler valve closed
6/3/2010	6:43:43 PM	Main Vac valve opened
6/3/2010	6:43:43 PM	Bypass valve opened
6/3/2010	6:43:43 PM	Helium MFC set to  0.000000
6/3/2010	6:43:43 PM	H2 MFC set to  0.000000
6/3/2010	6:43:43 PM	BCl3 MFC set to  0.000000
6/3/2010	6:43:43 PM	PHl3 MFC set to  0.000000
6/3/2010	6:43:43 PM	SiCl4 MFC set to  0.000000
6/3/2010	6:43:43 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	6:43:43 PM	Tube furnace set to 0
6/3/2010	6:43:43 PM	Run finished at 6:43 PM
6/3/2010	6:43:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	6:44:27 PM	Helium MFC set to  75.000000
6/3/2010	6:44:28 PM	Helium valve opened
6/3/2010	7:19:18 PM	Helium valve closed
6/3/2010	7:20:06 PM	Recipe started at 7:20 PM
6/3/2010	7:20:06 PM	Helium valve closed
6/3/2010	7:20:06 PM	BCl3 valve closed
6/3/2010	7:20:06 PM	PH3 valve closed
6/3/2010	7:20:06 PM	SiCl4 pre valve closed
6/3/2010	7:20:06 PM	SiCl4 post valve closed
6/3/2010	7:20:06 PM	Main Vac valve closed
6/3/2010	7:20:06 PM	Bypass valve closed
6/3/2010	7:20:06 PM	Bubbler valve closed
6/3/2010	7:20:06 PM	H2 valve opened
6/3/2010	7:20:06 PM	Helium MFC set to  0.000000
6/3/2010	7:20:06 PM	H2 MFC set to  500.000000
6/3/2010	7:20:06 PM	BCl3 MFC set to  0.000000
6/3/2010	7:20:06 PM	PHl3 MFC set to  0.000000
6/3/2010	7:20:06 PM	SiCl4 MFC set to  0.000000
6/3/2010	7:20:06 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	7:20:06 PM	Tube furnace set to 0
6/3/2010	7:21:24 PM	Helium valve closed
6/3/2010	7:21:24 PM	BCl3 valve closed
6/3/2010	7:21:24 PM	PH3 valve closed
6/3/2010	7:21:24 PM	SiCl4 pre valve closed
6/3/2010	7:21:24 PM	SiCl4 post valve closed
6/3/2010	7:21:24 PM	Main Vac valve closed
6/3/2010	7:21:24 PM	Bypass valve closed
6/3/2010	7:21:24 PM	H2 valve opened
6/3/2010	7:21:24 PM	Bubbler valve opened
6/3/2010	7:21:24 PM	Helium MFC set to  0.000000
6/3/2010	7:21:24 PM	H2 MFC set to  500.000000
6/3/2010	7:21:24 PM	BCl3 MFC set to  0.000000
6/3/2010	7:21:24 PM	PHl3 MFC set to  0.000000
6/3/2010	7:21:24 PM	SiCl4 MFC set to  0.000000
6/3/2010	7:21:24 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	7:21:24 PM	Tube furnace set to 1000
6/3/2010	7:43:04 PM	Helium valve closed
6/3/2010	7:43:04 PM	BCl3 valve closed
6/3/2010	7:43:04 PM	Main Vac valve closed
6/3/2010	7:43:04 PM	Bypass valve closed
6/3/2010	7:43:04 PM	H2 valve opened
6/3/2010	7:43:04 PM	PH3 valve opened
6/3/2010	7:43:04 PM	SiCl4 pre valve opened
6/3/2010	7:43:04 PM	SiCl4 post valve opened
6/3/2010	7:43:04 PM	Bubbler valve opened
6/3/2010	7:43:04 PM	Helium MFC set to  0.000000
6/3/2010	7:43:04 PM	H2 MFC set to  500.000000
6/3/2010	7:43:04 PM	BCl3 MFC set to  0.000000
6/3/2010	7:43:04 PM	PHl3 MFC set to  1.000000
6/3/2010	7:43:04 PM	SiCl4 MFC set to  50.000000
6/3/2010	7:43:04 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	7:43:04 PM	Tube furnace set to 1000
6/3/2010	8:03:04 PM	H2 valve closed
6/3/2010	8:03:04 PM	BCl3 valve closed
6/3/2010	8:03:04 PM	PH3 valve closed
6/3/2010	8:03:04 PM	SiCl4 pre valve closed
6/3/2010	8:03:04 PM	SiCl4 post valve closed
6/3/2010	8:03:04 PM	Main Vac valve closed
6/3/2010	8:03:04 PM	Bypass valve closed
6/3/2010	8:03:04 PM	Helium valve opened
6/3/2010	8:03:04 PM	Bubbler valve opened
6/3/2010	8:03:04 PM	Helium MFC set to  500.000000
6/3/2010	8:03:04 PM	H2 MFC set to  0.000000
6/3/2010	8:03:04 PM	BCl3 MFC set to  0.000000
6/3/2010	8:03:04 PM	PHl3 MFC set to  0.000000
6/3/2010	8:03:04 PM	SiCl4 MFC set to  0.000000
6/3/2010	8:03:04 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	8:03:04 PM	Tube furnace set to 0
6/3/2010	8:23:04 PM	Helium valve closed
6/3/2010	8:23:04 PM	H2 valve closed
6/3/2010	8:23:04 PM	BCl3 valve closed
6/3/2010	8:23:04 PM	PH3 valve closed
6/3/2010	8:23:04 PM	SiCl4 pre valve closed
6/3/2010	8:23:04 PM	SiCl4 post valve closed
6/3/2010	8:23:04 PM	Main Vac valve closed
6/3/2010	8:23:04 PM	Bypass valve closed
6/3/2010	8:23:04 PM	Bubbler valve closed
6/3/2010	8:23:04 PM	Helium MFC set to  0.000000
6/3/2010	8:23:04 PM	H2 MFC set to  0.000000
6/3/2010	8:23:04 PM	BCl3 MFC set to  0.000000
6/3/2010	8:23:04 PM	PHl3 MFC set to  0.000000
6/3/2010	8:23:04 PM	SiCl4 MFC set to  0.000000
6/3/2010	8:23:04 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	8:23:04 PM	Tube furnace set to 0
6/3/2010	8:23:05 PM	Run finished at 8:23 PM
6/3/2010	8:25:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2010	8:25:14 PM	Recipe started at 8:25 PM
6/3/2010	8:25:14 PM	H2 valve closed
6/3/2010	8:25:14 PM	BCl3 valve closed
6/3/2010	8:25:14 PM	PH3 valve closed
6/3/2010	8:25:14 PM	SiCl4 pre valve closed
6/3/2010	8:25:14 PM	SiCl4 post valve closed
6/3/2010	8:25:14 PM	Main Vac valve closed
6/3/2010	8:25:14 PM	Bypass valve closed
6/3/2010	8:25:14 PM	Bubbler valve closed
6/3/2010	8:25:14 PM	Helium valve opened
6/3/2010	8:25:14 PM	Helium MFC set to  500.000000
6/3/2010	8:25:14 PM	H2 MFC set to  0.000000
6/3/2010	8:25:14 PM	BCl3 MFC set to  0.000000
6/3/2010	8:25:14 PM	PHl3 MFC set to  0.000000
6/3/2010	8:25:14 PM	SiCl4 MFC set to  0.000000
6/3/2010	8:25:14 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	8:25:14 PM	Tube furnace set to 0
6/3/2010	8:25:15 PM	Helium valve closed
6/3/2010	8:25:15 PM	H2 valve closed
6/3/2010	8:25:15 PM	BCl3 valve closed
6/3/2010	8:25:15 PM	PH3 valve closed
6/3/2010	8:25:15 PM	SiCl4 pre valve closed
6/3/2010	8:25:15 PM	SiCl4 post valve closed
6/3/2010	8:25:15 PM	Main Vac valve closed
6/3/2010	8:25:15 PM	Bypass valve closed
6/3/2010	8:25:15 PM	Bubbler valve closed
6/3/2010	8:25:15 PM	Helium MFC set to  0.000000
6/3/2010	8:25:15 PM	H2 MFC set to  0.000000
6/3/2010	8:25:15 PM	BCl3 MFC set to  0.000000
6/3/2010	8:25:15 PM	PHl3 MFC set to  0.000000
6/3/2010	8:25:15 PM	SiCl4 MFC set to  0.000000
6/3/2010	8:25:15 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	8:25:15 PM	Tube furnace set to 0
6/3/2010	8:25:15 PM	Run finished at 8:25 PM
6/3/2010	8:25:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2010	8:28:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	8:28:22 PM	Recipe started at 8:28 PM
6/3/2010	8:28:22 PM	Helium valve closed
6/3/2010	8:28:22 PM	H2 valve closed
6/3/2010	8:28:22 PM	BCl3 valve closed
6/3/2010	8:28:22 PM	PH3 valve closed
6/3/2010	8:28:22 PM	SiCl4 pre valve closed
6/3/2010	8:28:22 PM	SiCl4 post valve closed
6/3/2010	8:28:22 PM	Main Vac valve closed
6/3/2010	8:28:22 PM	Bubbler valve closed
6/3/2010	8:28:22 PM	Bypass valve opened
6/3/2010	8:28:22 PM	Helium MFC set to  0.000000
6/3/2010	8:28:22 PM	H2 MFC set to  0.000000
6/3/2010	8:28:22 PM	BCl3 MFC set to  0.000000
6/3/2010	8:28:22 PM	PHl3 MFC set to  0.000000
6/3/2010	8:28:22 PM	SiCl4 MFC set to  0.000000
6/3/2010	8:28:22 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	8:28:23 PM	Tube furnace set to 0
6/3/2010	8:29:10 PM	Helium valve closed
6/3/2010	8:29:10 PM	H2 valve closed
6/3/2010	8:29:10 PM	BCl3 valve closed
6/3/2010	8:29:10 PM	PH3 valve closed
6/3/2010	8:29:10 PM	SiCl4 pre valve closed
6/3/2010	8:29:10 PM	SiCl4 post valve closed
6/3/2010	8:29:10 PM	Bubbler valve closed
6/3/2010	8:29:10 PM	Main Vac valve opened
6/3/2010	8:29:10 PM	Bypass valve opened
6/3/2010	8:29:10 PM	Helium MFC set to  0.000000
6/3/2010	8:29:10 PM	H2 MFC set to  0.000000
6/3/2010	8:29:10 PM	BCl3 MFC set to  0.000000
6/3/2010	8:29:10 PM	PHl3 MFC set to  0.000000
6/3/2010	8:29:10 PM	SiCl4 MFC set to  0.000000
6/3/2010	8:29:10 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	8:29:10 PM	Tube furnace set to 0
6/3/2010	8:29:10 PM	Run finished at 8:29 PM
6/3/2010	8:29:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	8:29:17 PM	Helium MFC set to  100.000000
6/3/2010	8:29:19 PM	Helium valve opened
6/3/2010	8:31:28 PM	Helium valve closed
6/3/2010	8:32:03 PM	Helium valve opened
6/3/2010	8:53:53 PM	Helium valve closed
6/3/2010	8:55:11 PM	Recipe started at 8:55 PM
6/3/2010	8:55:11 PM	Helium valve closed
6/3/2010	8:55:11 PM	BCl3 valve closed
6/3/2010	8:55:11 PM	PH3 valve closed
6/3/2010	8:55:11 PM	SiCl4 pre valve closed
6/3/2010	8:55:11 PM	SiCl4 post valve closed
6/3/2010	8:55:11 PM	Main Vac valve closed
6/3/2010	8:55:11 PM	Bypass valve closed
6/3/2010	8:55:11 PM	Bubbler valve closed
6/3/2010	8:55:11 PM	H2 valve opened
6/3/2010	8:55:11 PM	Helium MFC set to  0.000000
6/3/2010	8:55:11 PM	H2 MFC set to  500.000000
6/3/2010	8:55:11 PM	BCl3 MFC set to  0.000000
6/3/2010	8:55:11 PM	PHl3 MFC set to  0.000000
6/3/2010	8:55:11 PM	SiCl4 MFC set to  0.000000
6/3/2010	8:55:11 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	8:55:11 PM	Tube furnace set to 0
6/3/2010	8:56:29 PM	Helium valve closed
6/3/2010	8:56:29 PM	BCl3 valve closed
6/3/2010	8:56:29 PM	PH3 valve closed
6/3/2010	8:56:29 PM	SiCl4 pre valve closed
6/3/2010	8:56:29 PM	SiCl4 post valve closed
6/3/2010	8:56:29 PM	Main Vac valve closed
6/3/2010	8:56:29 PM	Bypass valve closed
6/3/2010	8:56:29 PM	H2 valve opened
6/3/2010	8:56:29 PM	Bubbler valve opened
6/3/2010	8:56:29 PM	Helium MFC set to  0.000000
6/3/2010	8:56:29 PM	H2 MFC set to  500.000000
6/3/2010	8:56:29 PM	BCl3 MFC set to  0.000000
6/3/2010	8:56:29 PM	PHl3 MFC set to  0.000000
6/3/2010	8:56:29 PM	SiCl4 MFC set to  0.000000
6/3/2010	8:56:29 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	8:56:29 PM	Tube furnace set to 1000
6/3/2010	9:18:09 PM	Helium valve closed
6/3/2010	9:18:09 PM	BCl3 valve closed
6/3/2010	9:18:09 PM	Main Vac valve closed
6/3/2010	9:18:09 PM	Bypass valve closed
6/3/2010	9:18:09 PM	H2 valve opened
6/3/2010	9:18:09 PM	PH3 valve opened
6/3/2010	9:18:09 PM	SiCl4 pre valve opened
6/3/2010	9:18:09 PM	SiCl4 post valve opened
6/3/2010	9:18:09 PM	Bubbler valve opened
6/3/2010	9:18:09 PM	Helium MFC set to  0.000000
6/3/2010	9:18:09 PM	H2 MFC set to  500.000000
6/3/2010	9:18:09 PM	BCl3 MFC set to  0.000000
6/3/2010	9:18:09 PM	PHl3 MFC set to  5.000000
6/3/2010	9:18:09 PM	SiCl4 MFC set to  50.000000
6/3/2010	9:18:09 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	9:18:09 PM	Tube furnace set to 1000
6/3/2010	9:38:09 PM	H2 valve closed
6/3/2010	9:38:09 PM	BCl3 valve closed
6/3/2010	9:38:09 PM	PH3 valve closed
6/3/2010	9:38:09 PM	SiCl4 pre valve closed
6/3/2010	9:38:09 PM	SiCl4 post valve closed
6/3/2010	9:38:09 PM	Main Vac valve closed
6/3/2010	9:38:09 PM	Bypass valve closed
6/3/2010	9:38:09 PM	Helium valve opened
6/3/2010	9:38:09 PM	Bubbler valve opened
6/3/2010	9:38:09 PM	Helium MFC set to  500.000000
6/3/2010	9:38:09 PM	H2 MFC set to  0.000000
6/3/2010	9:38:09 PM	BCl3 MFC set to  0.000000
6/3/2010	9:38:09 PM	PHl3 MFC set to  0.000000
6/3/2010	9:38:09 PM	SiCl4 MFC set to  0.000000
6/3/2010	9:38:09 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	9:38:09 PM	Tube furnace set to 0
6/3/2010	9:57:24 PM	Helium valve closed
6/3/2010	9:57:24 PM	H2 valve closed
6/3/2010	9:57:24 PM	BCl3 valve closed
6/3/2010	9:57:24 PM	PH3 valve closed
6/3/2010	9:57:24 PM	SiCl4 pre valve closed
6/3/2010	9:57:24 PM	SiCl4 post valve closed
6/3/2010	9:57:24 PM	Main Vac valve closed
6/3/2010	9:57:24 PM	Bypass valve closed
6/3/2010	9:57:24 PM	Bubbler valve closed
6/3/2010	9:57:24 PM	Helium MFC set to  0.000000
6/3/2010	9:57:24 PM	H2 MFC set to  0.000000
6/3/2010	9:57:24 PM	BCl3 MFC set to  0.000000
6/3/2010	9:57:24 PM	PHl3 MFC set to  0.000000
6/3/2010	9:57:24 PM	SiCl4 MFC set to  0.000000
6/3/2010	9:57:24 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	9:57:24 PM	Tube furnace set to 0
6/3/2010	9:57:24 PM	Run finished at 9:57 PM
6/3/2010	10:00:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	10:00:31 PM	Recipe started at 10:00 PM
6/3/2010	10:00:31 PM	Helium valve closed
6/3/2010	10:00:31 PM	H2 valve closed
6/3/2010	10:00:31 PM	BCl3 valve closed
6/3/2010	10:00:31 PM	PH3 valve closed
6/3/2010	10:00:31 PM	SiCl4 pre valve closed
6/3/2010	10:00:31 PM	SiCl4 post valve closed
6/3/2010	10:00:31 PM	Main Vac valve closed
6/3/2010	10:00:31 PM	Bubbler valve closed
6/3/2010	10:00:31 PM	Bypass valve opened
6/3/2010	10:00:31 PM	Helium MFC set to  0.000000
6/3/2010	10:00:31 PM	H2 MFC set to  0.000000
6/3/2010	10:00:31 PM	BCl3 MFC set to  0.000000
6/3/2010	10:00:31 PM	PHl3 MFC set to  0.000000
6/3/2010	10:00:31 PM	SiCl4 MFC set to  0.000000
6/3/2010	10:00:31 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	10:00:32 PM	Tube furnace set to 0
6/3/2010	10:01:18 PM	Helium valve closed
6/3/2010	10:01:18 PM	H2 valve closed
6/3/2010	10:01:18 PM	BCl3 valve closed
6/3/2010	10:01:18 PM	PH3 valve closed
6/3/2010	10:01:18 PM	SiCl4 pre valve closed
6/3/2010	10:01:18 PM	SiCl4 post valve closed
6/3/2010	10:01:18 PM	Bubbler valve closed
6/3/2010	10:01:18 PM	Main Vac valve opened
6/3/2010	10:01:18 PM	Bypass valve opened
6/3/2010	10:01:18 PM	Helium MFC set to  0.000000
6/3/2010	10:01:18 PM	H2 MFC set to  0.000000
6/3/2010	10:01:18 PM	BCl3 MFC set to  0.000000
6/3/2010	10:01:18 PM	PHl3 MFC set to  0.000000
6/3/2010	10:01:18 PM	SiCl4 MFC set to  0.000000
6/3/2010	10:01:18 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	10:01:19 PM	Tube furnace set to 0
6/3/2010	10:01:19 PM	Run finished at 10:01 PM
6/3/2010	10:01:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	10:03:46 PM	Helium MFC set to  100.000000
6/3/2010	10:03:47 PM	Helium valve opened
6/3/2010	10:10:45 PM	Helium valve closed
6/3/2010	10:12:12 PM	Helium valve opened
6/3/2010	10:21:23 PM	Helium valve closed
6/3/2010	10:22:55 PM	Helium valve opened
6/3/2010	10:25:09 PM	Helium valve closed
6/3/2010	10:26:40 PM	Helium valve opened
6/3/2010	10:26:54 PM	Helium valve closed
6/3/2010	10:27:27 PM	Recipe started at 10:27 PM
6/3/2010	10:27:27 PM	Helium valve closed
6/3/2010	10:27:27 PM	BCl3 valve closed
6/3/2010	10:27:27 PM	PH3 valve closed
6/3/2010	10:27:27 PM	SiCl4 pre valve closed
6/3/2010	10:27:27 PM	SiCl4 post valve closed
6/3/2010	10:27:27 PM	Main Vac valve closed
6/3/2010	10:27:27 PM	Bypass valve closed
6/3/2010	10:27:27 PM	Bubbler valve closed
6/3/2010	10:27:27 PM	H2 valve opened
6/3/2010	10:27:27 PM	Helium MFC set to  0.000000
6/3/2010	10:27:27 PM	H2 MFC set to  500.000000
6/3/2010	10:27:27 PM	BCl3 MFC set to  0.000000
6/3/2010	10:27:27 PM	PHl3 MFC set to  0.000000
6/3/2010	10:27:27 PM	SiCl4 MFC set to  0.000000
6/3/2010	10:27:27 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	10:27:27 PM	Tube furnace set to 0
6/3/2010	10:28:44 PM	Helium valve closed
6/3/2010	10:28:44 PM	BCl3 valve closed
6/3/2010	10:28:44 PM	PH3 valve closed
6/3/2010	10:28:44 PM	SiCl4 pre valve closed
6/3/2010	10:28:44 PM	SiCl4 post valve closed
6/3/2010	10:28:44 PM	Main Vac valve closed
6/3/2010	10:28:44 PM	Bypass valve closed
6/3/2010	10:28:44 PM	H2 valve opened
6/3/2010	10:28:44 PM	Bubbler valve opened
6/3/2010	10:28:44 PM	Helium MFC set to  0.000000
6/3/2010	10:28:44 PM	H2 MFC set to  500.000000
6/3/2010	10:28:44 PM	BCl3 MFC set to  0.000000
6/3/2010	10:28:44 PM	PHl3 MFC set to  0.000000
6/3/2010	10:28:44 PM	SiCl4 MFC set to  0.000000
6/3/2010	10:28:44 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	10:28:44 PM	Tube furnace set to 1000
6/3/2010	10:50:24 PM	Helium valve closed
6/3/2010	10:50:24 PM	BCl3 valve closed
6/3/2010	10:50:24 PM	Main Vac valve closed
6/3/2010	10:50:24 PM	Bypass valve closed
6/3/2010	10:50:24 PM	H2 valve opened
6/3/2010	10:50:24 PM	PH3 valve opened
6/3/2010	10:50:24 PM	SiCl4 pre valve opened
6/3/2010	10:50:24 PM	SiCl4 post valve opened
6/3/2010	10:50:24 PM	Bubbler valve opened
6/3/2010	10:50:24 PM	Helium MFC set to  0.000000
6/3/2010	10:50:24 PM	H2 MFC set to  500.000000
6/3/2010	10:50:24 PM	BCl3 MFC set to  0.000000
6/3/2010	10:50:24 PM	PHl3 MFC set to  15.000000
6/3/2010	10:50:24 PM	SiCl4 MFC set to  50.000000
6/3/2010	10:50:24 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	10:50:25 PM	Tube furnace set to 1000
6/3/2010	11:10:25 PM	H2 valve closed
6/3/2010	11:10:25 PM	BCl3 valve closed
6/3/2010	11:10:25 PM	PH3 valve closed
6/3/2010	11:10:25 PM	SiCl4 pre valve closed
6/3/2010	11:10:25 PM	SiCl4 post valve closed
6/3/2010	11:10:25 PM	Main Vac valve closed
6/3/2010	11:10:25 PM	Bypass valve closed
6/3/2010	11:10:25 PM	Helium valve opened
6/3/2010	11:10:25 PM	Bubbler valve opened
6/3/2010	11:10:25 PM	Helium MFC set to  500.000000
6/3/2010	11:10:25 PM	H2 MFC set to  0.000000
6/3/2010	11:10:25 PM	BCl3 MFC set to  0.000000
6/3/2010	11:10:25 PM	PHl3 MFC set to  0.000000
6/3/2010	11:10:25 PM	SiCl4 MFC set to  0.000000
6/3/2010	11:10:25 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	11:10:25 PM	Tube furnace set to 0
6/3/2010	11:30:25 PM	Helium valve closed
6/3/2010	11:30:25 PM	H2 valve closed
6/3/2010	11:30:25 PM	BCl3 valve closed
6/3/2010	11:30:25 PM	PH3 valve closed
6/3/2010	11:30:25 PM	SiCl4 pre valve closed
6/3/2010	11:30:25 PM	SiCl4 post valve closed
6/3/2010	11:30:25 PM	Main Vac valve closed
6/3/2010	11:30:25 PM	Bypass valve closed
6/3/2010	11:30:25 PM	Bubbler valve closed
6/3/2010	11:30:25 PM	Helium MFC set to  0.000000
6/3/2010	11:30:25 PM	H2 MFC set to  0.000000
6/3/2010	11:30:25 PM	BCl3 MFC set to  0.000000
6/3/2010	11:30:25 PM	PHl3 MFC set to  0.000000
6/3/2010	11:30:25 PM	SiCl4 MFC set to  0.000000
6/3/2010	11:30:25 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	11:30:25 PM	Tube furnace set to 0
6/3/2010	11:30:25 PM	Run finished at 11:30 PM
6/3/2010	11:34:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2010	11:34:25 PM	Recipe started at 11:34 PM
6/3/2010	11:34:25 PM	H2 valve closed
6/3/2010	11:34:25 PM	BCl3 valve closed
6/3/2010	11:34:25 PM	PH3 valve closed
6/3/2010	11:34:25 PM	SiCl4 pre valve closed
6/3/2010	11:34:25 PM	SiCl4 post valve closed
6/3/2010	11:34:25 PM	Main Vac valve closed
6/3/2010	11:34:25 PM	Bypass valve closed
6/3/2010	11:34:25 PM	Bubbler valve closed
6/3/2010	11:34:25 PM	Helium valve opened
6/3/2010	11:34:25 PM	Helium MFC set to  500.000000
6/3/2010	11:34:25 PM	H2 MFC set to  0.000000
6/3/2010	11:34:25 PM	BCl3 MFC set to  0.000000
6/3/2010	11:34:25 PM	PHl3 MFC set to  0.000000
6/3/2010	11:34:25 PM	SiCl4 MFC set to  0.000000
6/3/2010	11:34:25 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	11:34:26 PM	Tube furnace set to 0
6/3/2010	11:34:26 PM	Helium valve closed
6/3/2010	11:34:26 PM	H2 valve closed
6/3/2010	11:34:26 PM	BCl3 valve closed
6/3/2010	11:34:26 PM	PH3 valve closed
6/3/2010	11:34:26 PM	SiCl4 pre valve closed
6/3/2010	11:34:26 PM	SiCl4 post valve closed
6/3/2010	11:34:26 PM	Main Vac valve closed
6/3/2010	11:34:26 PM	Bypass valve closed
6/3/2010	11:34:26 PM	Bubbler valve closed
6/3/2010	11:34:26 PM	Helium MFC set to  0.000000
6/3/2010	11:34:26 PM	H2 MFC set to  0.000000
6/3/2010	11:34:26 PM	BCl3 MFC set to  0.000000
6/3/2010	11:34:26 PM	PHl3 MFC set to  0.000000
6/3/2010	11:34:26 PM	SiCl4 MFC set to  0.000000
6/3/2010	11:34:26 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	11:34:26 PM	Tube furnace set to 0
6/3/2010	11:34:26 PM	Run finished at 11:34 PM
6/3/2010	11:34:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/3/2010	11:39:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/3/2010	11:39:14 PM	Recipe started at 11:39 PM
6/3/2010	11:39:14 PM	Helium valve closed
6/3/2010	11:39:14 PM	H2 valve closed
6/3/2010	11:39:14 PM	BCl3 valve closed
6/3/2010	11:39:14 PM	PH3 valve closed
6/3/2010	11:39:14 PM	SiCl4 pre valve closed
6/3/2010	11:39:14 PM	SiCl4 post valve closed
6/3/2010	11:39:14 PM	Main Vac valve closed
6/3/2010	11:39:14 PM	Bubbler valve closed
6/3/2010	11:39:14 PM	Bypass valve opened
6/3/2010	11:39:14 PM	Helium MFC set to  0.000000
6/3/2010	11:39:14 PM	H2 MFC set to  0.000000
6/3/2010	11:39:14 PM	BCl3 MFC set to  0.000000
6/3/2010	11:39:14 PM	PHl3 MFC set to  0.000000
6/3/2010	11:39:14 PM	SiCl4 MFC set to  0.000000
6/3/2010	11:39:14 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	11:39:14 PM	Tube furnace set to 0
6/3/2010	11:40:03 PM	Helium valve closed
6/3/2010	11:40:03 PM	H2 valve closed
6/3/2010	11:40:03 PM	BCl3 valve closed
6/3/2010	11:40:03 PM	PH3 valve closed
6/3/2010	11:40:03 PM	SiCl4 pre valve closed
6/3/2010	11:40:03 PM	SiCl4 post valve closed
6/3/2010	11:40:03 PM	Bubbler valve closed
6/3/2010	11:40:03 PM	Main Vac valve opened
6/3/2010	11:40:03 PM	Bypass valve opened
6/3/2010	11:40:03 PM	Helium MFC set to  0.000000
6/3/2010	11:40:03 PM	H2 MFC set to  0.000000
6/3/2010	11:40:03 PM	BCl3 MFC set to  0.000000
6/3/2010	11:40:03 PM	PHl3 MFC set to  0.000000
6/3/2010	11:40:03 PM	SiCl4 MFC set to  0.000000
6/3/2010	11:40:03 PM	Bypass solenoid MFC set to  0.000000
6/3/2010	11:40:03 PM	Tube furnace set to 0
6/3/2010	11:40:03 PM	Run finished at 11:40 PM
6/3/2010	11:40:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
